Microstructure of magnetron sputtered PLZT thin films on sapphire

B. Tunaboylu, P. Harvey, Sadik Esener

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

The microstructural development and crystal structures of sputtered PLZT 9/65/35 films on r-plane sapphire with respect to deposition/annealing conditions were studied. The films were deposited at substrate temperatures below 500°C and annealed in the range 700° to 730°C for 1min to 20 min for complete perovskite formation either by rapid thermal annealing (RTA) or furnace annealing (FA). The optical transparency was excellent with smooth surfaces in the stoichiometric films but reduced in the Pb-deficient films. The grain sizes in the films varied from 0.1 μm to 0.8 μm and 0.2 μm to 1.2 μm after RTA and FA respectively.

Original languageEnglish (US)
Pages (from-to)11-32
Number of pages22
JournalUnknown Journal
Volume19
Issue number1-4
StatePublished - 1998
Externally publishedYes

Fingerprint

Aluminum Oxide
Sapphire
sapphire
Hot Temperature
Thin films
microstructure
Microstructure
annealing
thin films
Rapid thermal annealing
Annealing
furnaces
Furnaces
Temperature
Perovskite
Transparency
Crystal structure
grain size
crystal structure
Substrates

Keywords

  • Film characterization
  • Furnace annealing
  • Microstructure
  • PLZT films
  • Rapid thermal annealing
  • Sputtering

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Physics and Astronomy (miscellaneous)
  • Condensed Matter Physics

Cite this

Microstructure of magnetron sputtered PLZT thin films on sapphire. / Tunaboylu, B.; Harvey, P.; Esener, Sadik.

In: Unknown Journal, Vol. 19, No. 1-4, 1998, p. 11-32.

Research output: Contribution to journalArticle

Tunaboylu, B, Harvey, P & Esener, S 1998, 'Microstructure of magnetron sputtered PLZT thin films on sapphire', Unknown Journal, vol. 19, no. 1-4, pp. 11-32.
Tunaboylu, B. ; Harvey, P. ; Esener, Sadik. / Microstructure of magnetron sputtered PLZT thin films on sapphire. In: Unknown Journal. 1998 ; Vol. 19, No. 1-4. pp. 11-32.
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