TY - GEN
T1 - Light turning mirrors for hybrid integration of optical waveguides in SiON technology and CMOS based photo-detectors
AU - Civitci, Fehmi
AU - Driessen, Alfred
AU - Hoekstra, Hugo J.W.M.
N1 - Copyright:
Copyright 2011 Elsevier B.V., All rights reserved.
PY - 2011
Y1 - 2011
N2 - An efficient connection of integrated optical components and photo-detectors (PDs) is very important to realize small size and high functionality optoelectronic devices. A number of techniques have been reported to provide such a connection. One of these uses a focusing grating coupler on top of a waveguide (WG) to focus the light to the PD above the WG [1]. However, high volume production of such devices is not possible because no mask can be used to define the grating, owing to its relatively small period. Another technique uses a focused ion beam to mill total internal reflection (TIR) mirrors, but this technique is also not suitable for high volume production [2]. The third technique is based on a metal mirror, at which the desired mirror angle is fabricated by using a superficial layer in the wet etching process [3]. The efficiency of the mirrors is very high, but the thermal budget of the fabrication process is low because the melting temperature of metal layer used in the mirror is low.
AB - An efficient connection of integrated optical components and photo-detectors (PDs) is very important to realize small size and high functionality optoelectronic devices. A number of techniques have been reported to provide such a connection. One of these uses a focusing grating coupler on top of a waveguide (WG) to focus the light to the PD above the WG [1]. However, high volume production of such devices is not possible because no mask can be used to define the grating, owing to its relatively small period. Another technique uses a focused ion beam to mill total internal reflection (TIR) mirrors, but this technique is also not suitable for high volume production [2]. The third technique is based on a metal mirror, at which the desired mirror angle is fabricated by using a superficial layer in the wet etching process [3]. The efficiency of the mirrors is very high, but the thermal budget of the fabrication process is low because the melting temperature of metal layer used in the mirror is low.
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U2 - 10.1109/CLEOE.2011.5942738
DO - 10.1109/CLEOE.2011.5942738
M3 - Conference contribution
AN - SCOPUS:80052295748
SN - 9781457705335
T3 - 2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011
BT - 2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011
T2 - 2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011
Y2 - 22 May 2011 through 26 May 2011
ER -