Light turning mirrors for hybrid integration of optical waveguides in SiON technology and CMOS based photo-detectors

Fehmi Civitci, Alfred Driessen, Hugo J.W.M. Hoekstra

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

An efficient connection of integrated optical components and photo-detectors (PDs) is very important to realize small size and high functionality optoelectronic devices. A number of techniques have been reported to provide such a connection. One of these uses a focusing grating coupler on top of a waveguide (WG) to focus the light to the PD above the WG [1]. However, high volume production of such devices is not possible because no mask can be used to define the grating, owing to its relatively small period. Another technique uses a focused ion beam to mill total internal reflection (TIR) mirrors, but this technique is also not suitable for high volume production [2]. The third technique is based on a metal mirror, at which the desired mirror angle is fabricated by using a superficial layer in the wet etching process [3]. The efficiency of the mirrors is very high, but the thermal budget of the fabrication process is low because the melting temperature of metal layer used in the mirror is low.

Original languageEnglish (US)
Title of host publication2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011
DOIs
StatePublished - 2011
Externally publishedYes
Event2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011 - Munich, Germany
Duration: May 22 2011May 26 2011

Publication series

Name2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011

Conference

Conference2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011
CountryGermany
CityMunich
Period5/22/115/26/11

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Light turning mirrors for hybrid integration of optical waveguides in SiON technology and CMOS based photo-detectors'. Together they form a unique fingerprint.

Cite this