Ga+ FIB milling and measurement of FIB damage in sapphire

Brandon Van Leer, Huikai Cheng, Jessica Riesterer

Research output: Contribution to journalConference article

1 Scopus citations
Original languageEnglish (US)
Pages (from-to)346-347
Number of pages2
JournalMicroscopy and Microanalysis
Volume20
Issue number3
DOIs
StatePublished - Aug 1 2014
EventMicroscopy and Microanalysis 2014, M and M 2014 - Hartford, United States
Duration: Aug 3 2014Aug 7 2014

ASJC Scopus subject areas

  • Instrumentation

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