TY - JOUR
T1 - Fiber Temperature Sensor Utilizing a Thermomechanical MEMS Detector
AU - Çirkinoǧlu, Hüseyin Ozan
AU - Bilgin, Habib
AU - Çivitci, Fehmi
AU - Torun, Hamdi
AU - Ferhanoǧlu, Onur
N1 - Publisher Copyright:
© 2015 IEEE.
PY - 2016/2/1
Y1 - 2016/2/1
N2 - We propose a novel fiber sensor utilizing a thermomechanical MEMS element at the fiber tip. Owing to its Parylene/Titanium bimaterial structure, the MEMS membrane exhibits an out-of-plane displacement with changing temperature. Together with the MEMS element, the embedded diffraction grating forms an in-line interferometer, from which the displacement as well as the temperature can be deduced. The fabricated detector is placed at the single-mode fiber output that is collimated via a graded index lens. This novel architecture allows for integrating MEMS detectors on standard optical fibers, and easy substitution of the MEMS detector element to alter the measurement range and the response time of the sensor. Temperature and time-constant measurements are provided and verified with reference measurements, revealing a temperature sensitivity better than 20 mK and 2.5-ms response time, using low-cost laser source and photodetectors.
AB - We propose a novel fiber sensor utilizing a thermomechanical MEMS element at the fiber tip. Owing to its Parylene/Titanium bimaterial structure, the MEMS membrane exhibits an out-of-plane displacement with changing temperature. Together with the MEMS element, the embedded diffraction grating forms an in-line interferometer, from which the displacement as well as the temperature can be deduced. The fabricated detector is placed at the single-mode fiber output that is collimated via a graded index lens. This novel architecture allows for integrating MEMS detectors on standard optical fibers, and easy substitution of the MEMS detector element to alter the measurement range and the response time of the sensor. Temperature and time-constant measurements are provided and verified with reference measurements, revealing a temperature sensitivity better than 20 mK and 2.5-ms response time, using low-cost laser source and photodetectors.
KW - Microelectomechanical devices
KW - Optical device fabrication
KW - Optical fiber applications
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U2 - 10.1109/JLT.2015.2502992
DO - 10.1109/JLT.2015.2502992
M3 - Article
AN - SCOPUS:84962850037
SN - 0733-8724
VL - 34
SP - 1025
EP - 1030
JO - Journal of Lightwave Technology
JF - Journal of Lightwave Technology
IS - 3
M1 - 7335564
ER -