Fabrication, packaging, and catheter assembly of 2D CMUT arrays for endoscopic ultrasound and cardiac imaging

Azadeh Moini, Amin Nikoozadeh, Jung Woo Choe, Butrus T. Khuri-Yakub, Chienliu Chang, Doug Stephens, L. Scott Smith, David Sahn

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

Ultrasound is increasingly in demand as a medical imaging tool and can be particularly beneficial in the field of intracardiac echocardiography (ICE). However, many challenges remain in the development of a 3D ultrasound imaging system. We have designed and fabricated a quad-ring capacitive micromachined ultrasound transducer (CMUT) for real-time, volumetric medical imaging. Each CMUT array is composed of four concentric, independent ring arrays, each operating at a different frequency, with 128 elements per ring. In this project, one ring will be used for imaging. A large (5mm diameter) lumen is available for delivering other devices, including high intensity focused ultrasound transducers for therapeutic applications or optical fibers for photoacoustic imaging. We address several challenges in developing a 3D imaging system. Through wafer vias are incorporated in the fabrication process for producing 2D CMUT arrays. Device integration with electronics is achieved through solder bumping the arrays, designing a flexible PCB, and flip chip bonding CMUT and ASICs to the flexible substrate. Finally, we describe a method for integrating the flex assembly into a catheter shaft. The package, once assembled, will be used for in-vivo open chest experiments.

Original languageEnglish (US)
Title of host publicationAdvanced Fabrication and Manufacturing; Emerging Technology Frontiers; Energy, Health and Water- Applications of Nano-, Micro- and Mini-Scale Devices; MEMS and NEMS; Technology Update Talks; Thermal Management Using Micro Channels, Jets, Sprays
PublisherAmerican Society of Mechanical Engineers
Volume3
ISBN (Print)9780791856901
DOIs
StatePublished - 2015
EventASME 2015 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems, InterPACK 2015, collocated with the ASME 2015 13th International Conference on Nanochannels, Microchannels, and Minichannels - San Francisco, United States
Duration: Jul 6 2015Jul 9 2015

Other

OtherASME 2015 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems, InterPACK 2015, collocated with the ASME 2015 13th International Conference on Nanochannels, Microchannels, and Minichannels
CountryUnited States
CitySan Francisco
Period7/6/157/9/15

ASJC Scopus subject areas

  • Process Chemistry and Technology

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    Moini, A., Nikoozadeh, A., Choe, J. W., Khuri-Yakub, B. T., Chang, C., Stephens, D., Scott Smith, L., & Sahn, D. (2015). Fabrication, packaging, and catheter assembly of 2D CMUT arrays for endoscopic ultrasound and cardiac imaging. In Advanced Fabrication and Manufacturing; Emerging Technology Frontiers; Energy, Health and Water- Applications of Nano-, Micro- and Mini-Scale Devices; MEMS and NEMS; Technology Update Talks; Thermal Management Using Micro Channels, Jets, Sprays (Vol. 3). American Society of Mechanical Engineers. https://doi.org/10.1115/IPACK2015-48611