Synthesis and properties of KTN films by sol-gel deposition and RF-magnetron sputtering

B. Tunaboylu, S. R. Sashital, P. Harvey, S. C. Esener, A. Bhalla

Research output: Contribution to journalArticle

4 Scopus citations

Abstract

Homogeneous KTN (Potassium Tantalate Niobate) solutions were prepared using potassium acetate and metal alkoxides in 2-methoxyethanol by controlled hydrolysis with 1:2 (KTN/H2O) molar ratio. We report on the synthesis of sol-gel KTN for both the fabrication of homogeneous, dense and stoichiometrically correct ceramic discs by hot isostatic pressing and the deposition of spin-on as well as sputtered thin films. The spin-on KTN films on Pt/Si or r-sapphire were polycrystalline and stoichiometric, however, sputtered films on sapphire were fully (100) oriented and polycrystalline on Pt/SiO2/Si substrates with some potassium deficiency. The refractive indices of sputtered, dense KTN films on sapphire were between 2.00 and 2.05.

Original languageEnglish (US)
Pages (from-to)75-84
Number of pages10
JournalFerroelectrics, Letters Section
Volume28
Issue number3-4
DOIs
StatePublished - Jan 1 2001
Externally publishedYes

Keywords

  • KTN thin films
  • Magnetron sputtering
  • Sol-gel

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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