Simultaneous two-wavelength readout for thermo-mechanical MEMS detectors

Ulas Adiyan, Fehmi Civitci, Refik Burak Erarslan, Onur Ferhanoglu, Hamdi Torun, Hakan Urey

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

We proposed a novel two-wavelength optical readout for grating based thermo-mechanical MEMS arrays by using two color LEDS butt-coupled to a multi-mode fiber, which provides spatial auto-registration of two different color images on a single camera. The -1st diffraction orders of the different colors are simultaneously monitored with different channels (R and G) of the RGB camera. The sensitivity of the MEMS array is improved by using the channel data with higher sensitivity for each MEMS detector under a thermal load.

Original languageEnglish (US)
Title of host publication2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
PublisherIEEE Computer Society
Pages169-170
Number of pages2
ISBN (Electronic)9780992841423
DOIs
StatePublished - Oct 14 2014
Externally publishedYes
Event2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, United Kingdom
Duration: Aug 17 2014Aug 21 2014

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Conference

Conference2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
CountryUnited Kingdom
CityGlasgow
Period8/17/148/21/14

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Fingerprint Dive into the research topics of 'Simultaneous two-wavelength readout for thermo-mechanical MEMS detectors'. Together they form a unique fingerprint.

Cite this