TY - GEN
T1 - Simultaneous two-wavelength readout for thermo-mechanical MEMS detectors
AU - Adiyan, Ulas
AU - Civitci, Fehmi
AU - Erarslan, Refik Burak
AU - Ferhanoglu, Onur
AU - Torun, Hamdi
AU - Urey, Hakan
N1 - Publisher Copyright:
© 2014 University of Strathclyde.
PY - 2014/10/14
Y1 - 2014/10/14
N2 - We proposed a novel two-wavelength optical readout for grating based thermo-mechanical MEMS arrays by using two color LEDS butt-coupled to a multi-mode fiber, which provides spatial auto-registration of two different color images on a single camera. The -1st diffraction orders of the different colors are simultaneously monitored with different channels (R and G) of the RGB camera. The sensitivity of the MEMS array is improved by using the channel data with higher sensitivity for each MEMS detector under a thermal load.
AB - We proposed a novel two-wavelength optical readout for grating based thermo-mechanical MEMS arrays by using two color LEDS butt-coupled to a multi-mode fiber, which provides spatial auto-registration of two different color images on a single camera. The -1st diffraction orders of the different colors are simultaneously monitored with different channels (R and G) of the RGB camera. The sensitivity of the MEMS array is improved by using the channel data with higher sensitivity for each MEMS detector under a thermal load.
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U2 - 10.1109/OMN.2014.6924576
DO - 10.1109/OMN.2014.6924576
M3 - Conference contribution
AN - SCOPUS:84908032873
T3 - International Conference on Optical MEMS and Nanophotonics
SP - 169
EP - 170
BT - 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
PB - IEEE Computer Society
T2 - 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
Y2 - 17 August 2014 through 21 August 2014
ER -