Phase transformation and paired-plate precipitate formation in Pb0.91La0.09Zr0.65Ti0.35O3 films grown on sapphire substrates

B. Tunaboylu, C. S. Ozkan, A. Ata, K. Ring, S. Esener

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

We report on the phase transformation behavior of Pb0.91La0.09Zr0.65Ti0.35O3 (9/65/35) PLZT films grown on r-sapphire substrates via rf-magnetron sputtering. A complex microstructure results in these films depending on deposition and annealing conditions. A random equiaxed polycrystalline grain morphology was observed after rapid thermal annealing or furnace annealing when the as-deposited films were predominantly pyrochlore. Precipitate formation (100-150nm) was observed in PLZT films that were deposited at temperatures in excess of 490°C with a perovskite structure, after furnace annealing at 700°C. We believe that this is related to internal stresses in the films due to both the lattice mismatch and the thermal expansion mismatch between the PLZT film and the sapphire substrate.

Original languageEnglish (US)
Pages (from-to)199-206
Number of pages8
JournalMaterials Science in Semiconductor Processing
Volume5
Issue number2-3
DOIs
StatePublished - Apr 1 2002
Externally publishedYes

Keywords

  • Ferroelectrics
  • Magnetron sputtering
  • PLZT
  • Precipitate splitting

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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