Phase transformation and paired-plate precipitate formation in Pb0.91La0.09Zr0.65Ti0.35O3 films grown on sapphire substrates

B. Tunaboylu, C. S. Ozkan, A. Ata, K. Ring, Sadik Esener

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

We report on the phase transformation behavior of Pb0.91La0.09Zr0.65Ti0.35O3 (9/65/35) PLZT films grown on r-sapphire substrates via rf-magnetron sputtering. A complex microstructure results in these films depending on deposition and annealing conditions. A random equiaxed polycrystalline grain morphology was observed after rapid thermal annealing or furnace annealing when the as-deposited films were predominantly pyrochlore. Precipitate formation (100-150nm) was observed in PLZT films that were deposited at temperatures in excess of 490°C with a perovskite structure, after furnace annealing at 700°C. We believe that this is related to internal stresses in the films due to both the lattice mismatch and the thermal expansion mismatch between the PLZT film and the sapphire substrate.

Original languageEnglish (US)
Pages (from-to)199-206
Number of pages8
JournalMaterials Science in Semiconductor Processing
Volume5
Issue number2-3
DOIs
StatePublished - Apr 2002
Externally publishedYes

Fingerprint

Aluminum Oxide
Sapphire
phase transformations
Precipitates
precipitates
sapphire
Phase transitions
Substrates
annealing
Annealing
furnaces
Furnaces
Lattice mismatch
Rapid thermal annealing
Perovskite
Magnetron sputtering
residual stress
Thermal expansion
thermal expansion
Residual stresses

Keywords

  • Ferroelectrics
  • Magnetron sputtering
  • PLZT
  • Precipitate splitting

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Phase transformation and paired-plate precipitate formation in Pb0.91La0.09Zr0.65Ti0.35O3 films grown on sapphire substrates. / Tunaboylu, B.; Ozkan, C. S.; Ata, A.; Ring, K.; Esener, Sadik.

In: Materials Science in Semiconductor Processing, Vol. 5, No. 2-3, 04.2002, p. 199-206.

Research output: Contribution to journalArticle

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