New optical and electric-field assisted fluidic pick and place technique

Mihrimah Ozkan, Osman Kibar, Cengiz S. Ozkan, Sadik C. Esener

Research output: Contribution to journalConference article

1 Scopus citations

Abstract

Electrophoresis is a classical electrochemical transport process, which is based on the migration of charged particles in a suspension by the influence of an electric field. One of the important applications of this technique is the study of DNA/RNA hybridization on bio-electronic chips. However, electrophoretic pick and place techniques are currently limited to the serial `pick' and `place' of individual devices or materials. There is a need for the rapid and parallel pick-and-place of individual devices to particular locations on a host substrate. In this paper, we present a novel electrochemical system for non-lithographic, field assisted, fluidic pick and place assembly of devices on a silicon substrate by means of electrical and optical addressing. The methodology presented here can be applied to massively parallel assembly of large semiconductor arrays (>1000×1000) with fast (approximately a few seconds) and accurate positioning for a wide range of device sizes (0.8-100 μm). In our experiments, an electrochemical cell was used with Indium Tin Oxide (ITO) and an n-type Silicon substrate as the two electrode materials and de-ionized water (R = 18 MΩ) as the electrolytic medium between the two electrodes. Negatively charged polystyrene beads (0.8 μm, 10 μm, and 20 μm in diameter), 50-100 μm diameter negatively charged (by immersing SDS detergent) SiO2 pucks and 100 μm diameter light emitting diodes were successfully positioned on Silicon substrates by electrical addressing. In addition, 0.8 μm diameter beads were patterned on a un-patterned Silicon substrate by optical addressing.

Original languageEnglish (US)
Pages (from-to)1021-1026
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4089
StatePublished - Jan 1 2000
Externally publishedYes
EventOptics in Computing 2000 - Quebec City, Can
Duration: Jun 18 2000Jun 23 2000

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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