MEMS bimaterial IR sensor array with AC-coupled optical readout

Ulas Adiyan, Fehmi Civitci, Onur Ferhanoglu, Hamdi Torun, Hakan Urey

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

This paper demonstrates a 35-μm pixel pitch MEMS thermal sensor array with optical-readout. We implemented an AC-coupled readout method for a single MEMS pixel using a photodetector, which responds only to changes in the scene. AC-coupled readout substantially reduced the optical noise by eliminating the large DC beam. This method can be scaled to achieve smart pixel cameras for read sensor arrays with low-noise and high dynamic range.

Original languageEnglish (US)
Title of host publicationOMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781467368346
DOIs
StatePublished - Oct 2 2015
Externally publishedYes
EventInternational Conference on Optical MEMS and Nanophotonics, OMN 2015 - Jerusalem, Israel
Duration: Aug 2 2015Aug 5 2015

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
Volume02-05-August-2015
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Conference

ConferenceInternational Conference on Optical MEMS and Nanophotonics, OMN 2015
Country/TerritoryIsrael
CityJerusalem
Period8/2/158/5/15

Keywords

  • AC coupling
  • IR Detection
  • Optical Readout
  • Thermo-Mechanical MEMS

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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