Massively parallel low-cost pick-and-place of optoelectronic devices by electrochemical fluidic processing

Mihrimah Ozkan, Osman Kibar, Cengiz S. Ozkan, Sadik C. Esener

Research output: Contribution to journalArticle

4 Scopus citations

Abstract

We describe a novel electrochemical technique for the nonlithographic, f luidic pick-and-place assembly of optoelectronic devices by electrical and optical addressing. An electrochemical cell was developed that consists of indium tin oxide (ITO) and n-type silicon substrates as the two electrode materials and deionized water (R = 18 MΩ) as the electrolytic medium between the two electrodes. 0.8-20-μm-diameter negatively charged polystyrene beads, 50-100-μm-diameter SiO2 pucks, and 50-μm LED's were successfully integrated upon a patterned silicon substrate by electrical addressing. In addition, 0.8-μ;m-diameter beads were integrated upon a homogeneous silicon substrate by optical addressing. This method can be applied to massively parallel assembly (>1000 X 1000 arrays) of multiple types of devices (of a wide size range) with very fast (a few seconds) and accurate positioning.

Original languageEnglish (US)
Pages (from-to)1285-1287
Number of pages3
JournalOptics Letters
Volume25
Issue number17
DOIs
StatePublished - Sep 1 2000
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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