High spatial resolution time-of-Flight secondary ion mass spectrometry for the masses: A novel orthogonal ToF FIB-SIMS instrument with in situ AFM

James A. Whitby, Fredrik Östlund, Peter Horvath, Mihai Gabureac, Jessica L. Riesterer, Ivo Utke, Markus Hohl, Libor Sedláček, Jaroslav Jiruše, Vinzenz Friedli, Mikhael Bechelany, Johann Michler

Research output: Contribution to journal › Article › peer-review

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Engineering & Materials Science

Chemical Compounds