Fiber temperature sensor utilizing a thermomechanical MEMS detector

H. Ozan Çirkinolu, Habib Bilgin, Fehmi Çivitci, Hamdi Torun, Onur Ferhanoglu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We propose a novel fiber sensor utilizing a thermomechanical MEMS element at the fiber tip. Owing to its Parylene/Titanium bimaterial structure, the MEMS membrane exhibits an out-of plane displacement with changing temperature. Together with the MEMS element, the embedded diffraction grating forms an in-line interferometer, from which the displacement as well as the temperature can be deduced. The fabricated detector is placed at the single-mode fiber output that is collimated via a graded index lens. This novel architecture allows for integrating MEMS detectors on standard optical fibers, and easy substitution of the MEMS detector element to alter the measurement range and the response time of the sensor.Temperature and time-constant measurements are provided and verified with reference measurements, revealing better than 20 mK temperature sensitivity and 2.5 msec response time, using low-cost laser source and photodetectors.

Original languageEnglish (US)
Title of host publicationPhotonic Fiber and Crystal Devices
Subtitle of host publicationAdvances in Materials and Innovations in Device Applications X
EditorsRuyan Guo, Shizhuo Yin
PublisherSPIE
ISBN (Electronic)9781510603073
DOIs
StatePublished - 2016
Externally publishedYes
EventPhotonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X - San Diego, United States
Duration: Aug 28 2016Aug 29 2016

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9958
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferencePhotonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X
CountryUnited States
CitySan Diego
Period8/28/168/29/16

Keywords

  • Microelectomechanical devices
  • Optical device fabrication
  • Optical fiber applications
  • Temperature measurement

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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