TY - GEN
T1 - Fiber temperature sensor utilizing a thermomechanical MEMS detector
AU - Çirkinolu, H. Ozan
AU - Bilgin, Habib
AU - Çivitci, Fehmi
AU - Torun, Hamdi
AU - Ferhanoglu, Onur
N1 - Publisher Copyright:
© 2016 SPIE.
Copyright:
Copyright 2017 Elsevier B.V., All rights reserved.
PY - 2016
Y1 - 2016
N2 - We propose a novel fiber sensor utilizing a thermomechanical MEMS element at the fiber tip. Owing to its Parylene/Titanium bimaterial structure, the MEMS membrane exhibits an out-of plane displacement with changing temperature. Together with the MEMS element, the embedded diffraction grating forms an in-line interferometer, from which the displacement as well as the temperature can be deduced. The fabricated detector is placed at the single-mode fiber output that is collimated via a graded index lens. This novel architecture allows for integrating MEMS detectors on standard optical fibers, and easy substitution of the MEMS detector element to alter the measurement range and the response time of the sensor.Temperature and time-constant measurements are provided and verified with reference measurements, revealing better than 20 mK temperature sensitivity and 2.5 msec response time, using low-cost laser source and photodetectors.
AB - We propose a novel fiber sensor utilizing a thermomechanical MEMS element at the fiber tip. Owing to its Parylene/Titanium bimaterial structure, the MEMS membrane exhibits an out-of plane displacement with changing temperature. Together with the MEMS element, the embedded diffraction grating forms an in-line interferometer, from which the displacement as well as the temperature can be deduced. The fabricated detector is placed at the single-mode fiber output that is collimated via a graded index lens. This novel architecture allows for integrating MEMS detectors on standard optical fibers, and easy substitution of the MEMS detector element to alter the measurement range and the response time of the sensor.Temperature and time-constant measurements are provided and verified with reference measurements, revealing better than 20 mK temperature sensitivity and 2.5 msec response time, using low-cost laser source and photodetectors.
KW - Microelectomechanical devices
KW - Optical device fabrication
KW - Optical fiber applications
KW - Temperature measurement
UR - http://www.scopus.com/inward/record.url?scp=85008479940&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85008479940&partnerID=8YFLogxK
U2 - 10.1117/12.2237134
DO - 10.1117/12.2237134
M3 - Conference contribution
AN - SCOPUS:85008479940
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Photonic Fiber and Crystal Devices
A2 - Guo, Ruyan
A2 - Yin, Shizhuo
PB - SPIE
T2 - Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X
Y2 - 28 August 2016 through 29 August 2016
ER -