Ferroelectric PLZT thin films deposited by RF triode magnetron sputtering for spatial light modulators

Bahadir Tunaboylu, Phillip C. Harvey, Fei Deng, Chi Fan, Sadik Esener

Research output: Contribution to conferencePaper

2 Scopus citations

Abstract

Lead lanthanum zirconate titanate, PLZT (9/65/35) thin films were deposited on r-plane sapphire and Pt/Si by triode-magnetron sputtering at low temperature and transformed to the perovskite phase by rapid-thermal annealing. To form perovskite phase directly during deposition requires high substrate temperatures which generally cause lead and/or titanium deficiency. At relatively low deposition temperatures, the deposited films tend to consist of both pyrochlore and perovskite phases. A full transformation of pyrochlore to perovskite phase is difficult. With low temperature deposition and rapid-thermal annealing, perovskite PLZT (9/65/35) films with strong (110) orientation were obtained. Their optical and dielectric properties are reported.

Original languageEnglish (US)
Pages675-678
Number of pages4
StatePublished - Dec 1 1996
Externally publishedYes
EventProceedings of the 1996 10th IEEE International Symposium on Applications of Ferroelectrics, ISAF. Part 1 (of 2) - East Brunswick, NJ, USA
Duration: Aug 18 1996Aug 21 1996

Other

OtherProceedings of the 1996 10th IEEE International Symposium on Applications of Ferroelectrics, ISAF. Part 1 (of 2)
CityEast Brunswick, NJ, USA
Period8/18/968/21/96

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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    Tunaboylu, B., Harvey, P. C., Deng, F., Fan, C., & Esener, S. (1996). Ferroelectric PLZT thin films deposited by RF triode magnetron sputtering for spatial light modulators. 675-678. Paper presented at Proceedings of the 1996 10th IEEE International Symposium on Applications of Ferroelectrics, ISAF. Part 1 (of 2), East Brunswick, NJ, USA, .