Design issues and development of monolithic silicon/lead lanthanum zirconate titanate integration technologies for smart spatial light modulators

A. Ersen, S. Krishnakumar, V. Ozguz, J. Wang, C. Fan, S. Esener, S. H. Lee

Research output: Contribution to journalArticle

13 Scopus citations

Abstract

System, device, and material issues for the design and realization of smart spatial light modulators are discussed. Silicon and lead lanthanum zirconate titanate (PLZT) are two promising materials that meet the system requirements. Two different technologies for the integration of Si and PLZT are described. Results show that large-scale smart spatial light modulators can be realized with Si/PLZT technologies.

Original languageEnglish (US)
Pages (from-to)3950-3965
Number of pages16
JournalApplied Optics
Volume31
Issue number20
DOIs
StatePublished - Jul 10 1992
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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