System, device, and material issues for the design and realization of smart spatial light modulators are discussed. Silicon and lead lanthanum zirconate titanate (PLZT) are two promising materials that meet the system requirements. Two different technologies for the integration of Si and PLZT are described. Results show that large-scale smart spatial light modulators can be realized with Si/PLZT technologies.
|Original language||English (US)|
|Number of pages||16|
|State||Published - Jul 10 1992|
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Engineering (miscellaneous)
- Electrical and Electronic Engineering