Deposition and Characterization of Thin Ferroelectric Lead Lanthanum Zirconate Titanate (PLZT) Films on Sapphire For Spatial Light Modulators Applications

S. Krishnakumar, V. H. Ozguz, C. Fan, C. Cozzolino, S. C. Esener, S. H. Lee

Research output: Contribution to journalArticle

24 Scopus citations

Abstract

Ferroelectric lead lanthanum zirconate titanate (PLZT) films are deposited on r-plane sapphire using R-F triode magnetron sputtering. Perovskite PLZT films with the desired composition (9/65/35) are obtained using compensated deposition techniques around 500°C and post deposition annealing at 650°C. The deposited films exhibit good optical and electrooptical properties. The room temperature dielectric constant of the films was 1800 at 10 KHz. The refractive index of the films was in the range 2.2-2.5. The films showed a quadratic E-O effect with R = 0.6 x 10-16 m2/V2. The development of PLZT on silicon-on-sapphire smart spatial light modulators, using these films, is also explored.

Original languageEnglish (US)
Pages (from-to)585-590
Number of pages6
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume38
Issue number6
DOIs
StatePublished - Nov 1991
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

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