Deposition and Characterization of Thin Ferroelectric Lead Lanthanum Zirconate Titanate (PLZT) Films on Sapphire For Spatial Light Modulators Applications

S. Krishnakumar, V. H. Ozguz, C. Fan, C. Cozzolino, Sadik Esener, S. H. Lee

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

Ferroelectric lead lanthanum zirconate titanate (PLZT) films are deposited on r-plane sapphire using R-F triode magnetron sputtering. Perovskite PLZT films with the desired composition (9/65/35) are obtained using compensated deposition techniques around 500°C and post deposition annealing at 650°C. The deposited films exhibit good optical and electrooptical properties. The room temperature dielectric constant of the films was 1800 at 10 KHz. The refractive index of the films was in the range 2.2-2.5. The films showed a quadratic E-O effect with R = 0.6 x 10-16 m2/V2. The development of PLZT on silicon-on-sapphire smart spatial light modulators, using these films, is also explored.

Original languageEnglish (US)
Pages (from-to)585-590
Number of pages6
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume38
Issue number6
DOIs
StatePublished - 1991
Externally publishedYes

Fingerprint

Lanthanum
light modulators
lanthanum
Sapphire
Ferroelectric materials
sapphire
Lead
Triodes
triodes
Spatial light modulators
Perovskite
Magnetron sputtering
Refractive index
magnetron sputtering
Permittivity
Annealing
permittivity
refractivity
optical properties
Silicon

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Acoustics and Ultrasonics
  • Instrumentation

Cite this

Deposition and Characterization of Thin Ferroelectric Lead Lanthanum Zirconate Titanate (PLZT) Films on Sapphire For Spatial Light Modulators Applications. / Krishnakumar, S.; Ozguz, V. H.; Fan, C.; Cozzolino, C.; Esener, Sadik; Lee, S. H.

In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 38, No. 6, 1991, p. 585-590.

Research output: Contribution to journalArticle

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