Abstract
We report a means of fabricating hydrophilic domains in a hydrophobic background by lithographically patterning an adhesive hydrophobic layer. Polymer microlenses were fabricated on these substrates by use of a dip-coating technique. Various lens shapes (circular, elliptical, square) were fabricated on a variety of substrates (SiO2, SiN, GaAs, InP, etc.), ranging in size from 2 to 500 μm in diameter, with fill factors of up to 90%. Plano-convex and double-convex lenses were fabricated, with f-numbers as low as 1.38 and 1.2, respectively. Optimum lens surfaces deviated from spherical by just ±5nm. The lenses are stable at room temperature and exhibit minimal degradation after 24 h at 105 °C. The transfer of these polymer lenses to an underlying substrate was also demonstrated.
Original language | English (US) |
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Pages (from-to) | 975-977 |
Number of pages | 3 |
Journal | Optics Letters |
Volume | 25 |
Issue number | 13 |
DOIs | |
State | Published - Jul 1 2000 |
Externally published | Yes |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics