An implant-free AlGaAs/GaAs HBT IC technology incorporating 1.4 THz Schottky diodes

S. J. Prasad, B. Vetanen, C. Haynes, S. Park, I. Beers, S. Diamond, G. Pubanz, J. Ebner, S. Sanielevici, A. Agoston

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A non-self-aligned HBT (heterojunction bipolar transistor) process capable of 45 GHz fT and fmax with 1.4-THz Schottky diodes is reported. An HBT divide-by-eight prescalar circuit clocks at 13.5 GHz and a pulser circuit using Schottky diodes demonstrates 8.6-ps rise time. The Schottky diodes are suitable for sampler/pulser applications as well as nichrome resistors, MIM capacitors, and air-bridge inductors. This process does not use ion-implantation for isolation or reduction of collector capacitance.

Original languageEnglish (US)
Title of host publicationProceedings of the 1991 Bipolar Circuits and Technology Meeting
PublisherPubl by IEEE
Pages79-82
Number of pages4
ISBN (Print)078030103X
StatePublished - 1992
Externally publishedYes
EventProceedings of the 1991 Bipolar Circuits and Technology Meeting - Minneapolis, MN, USA
Duration: Sep 9 1991Sep 10 1991

Publication series

NameProceedings of the 1991 Bipolar Circuits and Technology Meeting

Conference

ConferenceProceedings of the 1991 Bipolar Circuits and Technology Meeting
CityMinneapolis, MN, USA
Period9/9/919/10/91

ASJC Scopus subject areas

  • General Engineering

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