Abstract
A novel type of integrated optical sensor has been evaluated theoretically. The sensing is based on the large effect of the refractive index of the measurand (generally a liquid) to the mode profile of a guided mode close to the cut-off. A special type turns over into a leaky mode-based sensor. The sensor has small size and is simple to fabricate. For the SiON technology-based structures used as a vehicle for the evaluation, a resolution of the refractive index in the range of 10-6 RIU has been achieved; however, with an operation range around a certain working index of ≈2 × 10-4 RIU only. This working index can be shifted to any desired value, within a certain range, by appropriately choosing the geometrical and material parameters. Because of technological tolerances, for practical operation, read-out based on wavelength scanning is required. The sensor can be used especially as an alarming sensor.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 111-119 |
| Number of pages | 9 |
| Journal | Sensors and Actuators, B: Chemical |
| Volume | 205 |
| DOIs | |
| State | Published - Dec 15 2014 |
| Externally published | Yes |
Keywords
- Guided-wave optics
- Integrated optics
- Segmented waveguides
- Sensing
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering
- Materials Chemistry