A 45 GHz AlGaAs/GaAs HBT IC technology

S. J. Prasad, B. Vetanen, C. Haynes, S. Park, I. Beers, S. Diamond, G. Pubanz, J. Ebner, S. Sanielevici, A. Agoston

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A non-self-aligned HBT (heterojunction bipolar transistor) IC process with fT and fmax of 45 GHz is reported. The process provides 1.4 THz Schottky diodes, nichrome resistors, MIM capacitors, and air-bridge inductors. The process does not use any ion implantation. An HBT prescalar circuit designed with this process clocks at 13.5 GHz. A pulser circuit using Schottky diodes demonstrates 8.6 ps risetime.

Original languageEnglish (US)
Title of host publicationTechnical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit)
PublisherPubl by IEEE
Pages121-124
Number of pages4
ISBN (Print)078030196X
StatePublished - Jan 1992
Externally publishedYes
Event13th Annual GaAs IC Symposium Technical Digest - Monterey, CA, USA
Duration: Oct 20 1991Oct 23 1991

Publication series

NameTechnical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit)

Conference

Conference13th Annual GaAs IC Symposium Technical Digest
CityMonterey, CA, USA
Period10/20/9110/23/91

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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